Service & Support   

We offer professional Services in cooperation with our partners: 


  • Installations and Decomissining of different FAB Equipment
  • Service- and Repair on Mask Aligner systems
  • Service of Heating Cassettes
  • Service- and Process support for Plating- and Wet tools
  • Manage different Trainings for Experts


Spare parts & Consumables 

  • Lithography tools
  • Wet- and Plating systems
  • Furnaces  (Diffusion, LPCVD)
  • Heating Element Refurbishment
  • CVD equipment
  • Metrology systems
  • Consumables: 

          Inspection lasers,

          Ceramic parts for heating cassettes


Please contact us for your special requirements          of parts and consumables!